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Substrate independent mechanical properties of thin low dielectric constant materials

dc.contributor.authorOkudur, Oguzhan Orkut
dc.contributor.authorVanstreels, Kris
dc.contributor.authorHangen, Ude
dc.contributor.authorQui, Anqi
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-23T13:21:10Z
dc.date.available2021-10-23T13:21:10Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27091
dc.sourceIIOimport
dc.titleSubstrate independent mechanical properties of thin low dielectric constant materials
dc.typeMeeting abstract
dc.contributor.imecauthorOkudur, Oguzhan Orkut
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecOkudur, Oguzhan Orkut::0000-0002-4790-7772
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage63
dc.source.endpage64
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate20/03/2016
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - open access
imec.internalnotesPaper CR2


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