Low temperature effect on strained and relaxed Ge pFinFETs STI last processes

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Authors
Oliveira, Alberto; Simoen, Eddy; Agopian, Paula G.D.; Martino, Joao A.; Mitard, Jerome; Witters, Liesbeth; Collaert, Nadine; Thean, Aaron; Claeys, Cor
Conference
High Purity and High Mobility Semiconductors 14
Title
Low temperature effect on strained and relaxed Ge pFinFETs STI last processes
Publication type
Proceedings paper
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