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Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach

dc.contributor.authorPalov, A
dc.contributor.authorVoronina, E
dc.contributor.authorRakhimova, T
dc.contributor.authorLopaev, D
dc.contributor.authorZyryanov, Sergey M.
dc.contributor.authorMankelevich, Yu
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-23T13:30:19Z
dc.date.available2021-10-23T13:30:19Z
dc.date.issued2016
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27113
dc.sourceIIOimport
dc.titleEffect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach
dc.typeJournal article
dc.contributor.imecauthorKrishtab, Mikhail
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage41205
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue4
dc.source.volume34
dc.identifier.urlhttp://scitation.aip.org/content/avs/journal/jvstb/34/4/10.1116/1.4946838
imec.availabilityPublished - open access


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