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Improved cost-effectiveness of the block co-polymer anneal process for DSA

dc.contributor.authorPathangi Sriraman, Hari
dc.contributor.authorStokhof, Maarten
dc.contributor.authorKnaepen, Werner
dc.contributor.authorVaid, Varun
dc.contributor.authorMallik, Arindam
dc.contributor.authorChan, BT
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorMaes, Jan
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-23T13:35:13Z
dc.date.available2021-10-23T13:35:13Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27125
dc.sourceIIOimport
dc.titleImproved cost-effectiveness of the block co-polymer anneal process for DSA
dc.typeProceedings paper
dc.contributor.imecauthorStokhof, Maarten
dc.contributor.imecauthorKnaepen, Werner
dc.contributor.imecauthorMallik, Arindam
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecMallik, Arindam::0000-0002-0742-9366
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage97771Z
dc.source.conferenceAlternative Lithographic Technologies VIII
dc.source.conferencedate20/02/2016
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2512367
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9777


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