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Large-scale and ultra-thin boron-doped nanocrystalline diamond membranes: fabrication, electrical and mechanical characterization

dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorMohr, M.
dc.contributor.authorDrijkoningen, Sien
dc.contributor.authorBehroudj, A.
dc.contributor.authorFecht, H.-J.
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-23T13:43:14Z
dc.date.available2021-10-23T13:43:14Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27144
dc.sourceIIOimport
dc.titleLarge-scale and ultra-thin boron-doped nanocrystalline diamond membranes: fabrication, electrical and mechanical characterization
dc.typeOral presentation
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XXI
dc.source.conferencedate9/03/2016
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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