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Multi-layer graphene interconnect - a feasibility study

dc.contributor.authorPolitou, Maria
dc.contributor.authorWu, Xiangyu
dc.contributor.authorContino, Antonino
dc.contributor.authorSoree, Bart
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorLin, Dennis
dc.contributor.authorRadu, Iuliana
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAsselberghs, Inge
dc.date.accessioned2021-10-23T13:48:07Z
dc.date.available2021-10-23T13:48:07Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27156
dc.sourceIIOimport
dc.titleMulti-layer graphene interconnect - a feasibility study
dc.typeProceedings paper
dc.contributor.imecauthorWu, Xiangyu
dc.contributor.imecauthorContino, Antonino
dc.contributor.imecauthorSoree, Bart
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.orcidimecSoree, Bart::0000-0002-4157-1956
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage200
dc.source.endpage202
dc.source.conferenceIEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC
dc.source.conferencedate23/05/2016
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access


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