dc.contributor.author | Pollentier, Ivan | |
dc.contributor.author | Vanpaemel, Johannes | |
dc.contributor.author | Lee, Jae Uk | |
dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | Zahedmanesh, Houman | |
dc.contributor.author | Huyghebaert, Cedric | |
dc.contributor.author | Gallagher, Emily | |
dc.date.accessioned | 2021-10-23T13:48:33Z | |
dc.date.available | 2021-10-23T13:48:33Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27157 | |
dc.source | IIOimport | |
dc.title | EUV lithography imaging using novel pellicle membranes | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Pollentier, Ivan | |
dc.contributor.imecauthor | Lee, Jae Uk | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | Zahedmanesh, Houman | |
dc.contributor.imecauthor | Huyghebaert, Cedric | |
dc.contributor.imecauthor | Gallagher, Emily | |
dc.contributor.orcidimec | Pollentier, Ivan::0000-0002-4266-6500 | |
dc.contributor.orcidimec | Lee, Jae Uk::0000-0002-9434-5055 | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
dc.contributor.orcidimec | Gallagher, Emily::0000-0002-2927-8298 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 977620 | |
dc.source.conference | Extreme Ultraviolet (EUV) Lithography VII | |
dc.source.conferencedate | 21/02/2016 | |
dc.source.conferencelocation | Bellingham, WA USA | |
dc.identifier.url | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2505818 | |
imec.availability | Published - imec | |
imec.internalnotes | Proceedings of SPIE; Vol. 9776 | |