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Material quality optimization of Si epitaxial wafers and process development on freestanding epitaxial Si substrates

dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-23T13:49:33Z
dc.date.available2021-10-23T13:49:33Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27160
dc.sourceIIOimport
dc.titleMaterial quality optimization of Si epitaxial wafers and process development on freestanding epitaxial Si substrates
dc.typeOral presentation
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference5th Annual c-Si PV Manufacturing Conference
dc.source.conferencedate13/07/2016
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


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