dc.contributor.author | Popovici, Mihaela Ioana | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | Afanasiev, Valeri | |
dc.contributor.author | Sereni, Gabriele | |
dc.contributor.author | Larcher, Luca | |
dc.contributor.author | Redolfi, Augusto | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Jurczak, Gosia | |
dc.date.accessioned | 2021-10-23T13:50:40Z | |
dc.date.available | 2021-10-23T13:50:40Z | |
dc.date.issued | 2016 | |
dc.identifier.issn | 1862-6254 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27163 | |
dc.source | IIOimport | |
dc.title | Low leakage stoichiometric SrTiO3 dielectric for advanced metal-insulator-metal capacitors | |
dc.type | Journal article | |
dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | Afanasiev, Valeri | |
dc.contributor.imecauthor | Redolfi, Augusto | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | Jurczak, Gosia | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 420 | |
dc.source.endpage | 425 | |
dc.source.journal | Physica Status Solidi. Rapid Research Letters | |
dc.source.issue | 5 | |
dc.source.volume | 10 | |
dc.identifier.url | http://onlinelibrary.wiley.com/doi/10.1002/pssr.201600036/abstract | |
imec.availability | Published - imec | |