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Low leakage stoichiometric SrTiO3 dielectric for advanced metal-insulator-metal capacitors

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorKaczer, Ben
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorSereni, Gabriele
dc.contributor.authorLarcher, Luca
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorJurczak, Gosia
dc.date.accessioned2021-10-23T13:50:40Z
dc.date.available2021-10-23T13:50:40Z
dc.date.issued2016
dc.identifier.issn1862-6254
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27163
dc.sourceIIOimport
dc.titleLow leakage stoichiometric SrTiO3 dielectric for advanced metal-insulator-metal capacitors
dc.typeJournal article
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpage420
dc.source.endpage425
dc.source.journalPhysica Status Solidi. Rapid Research Letters
dc.source.issue5
dc.source.volume10
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201600036/abstract
imec.availabilityPublished - imec


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