Low leakage stoichiometric SrTiO3 dielectric for advanced metal-insulator-metal capacitors

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Authors
Popovici, Mihaela Ioana; Kaczer, Ben; Afanasiev, Valeri; Sereni, Gabriele; Larcher, Luca; Redolfi, Augusto; Van Elshocht, Sven; Jurczak, Gosia
ISSN
1862-6254
Issue
5
Journal
Physica Status Solidi. Rapid Research Letters
Volume
10
Title
Low leakage stoichiometric SrTiO3 dielectric for advanced metal-insulator-metal capacitors
Publication type
Journal article
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