Publication:

Low leakage stoichiometric SrTiO3 dielectric for advanced metal-insulator-metal capacitors

Date

2016
Journal article
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dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorKaczer, Ben
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorSereni, Gabriele
dc.contributor.authorLarcher, Luca
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorJurczak, Gosia
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-23T13:50:40Z
dc.date.available2021-10-23T13:50:40Z
dc.date.issued2016
dc.identifier.issn1862-6254
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27163
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201600036/abstract
dc.source.beginpage420
dc.source.endpage425
dc.source.issue5
dc.source.journalPhysica Status Solidi. Rapid Research Letters
dc.source.volume10
dc.title

Low leakage stoichiometric SrTiO3 dielectric for advanced metal-insulator-metal capacitors

dc.typeJournal article
dspace.entity.typePublication
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