Publication:

Plasma-assisted ALD of LiPO(N) for solid state batteries

Date

2016

Meeting abstract

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Author(s)

;

;

Hornsveld, Norah

;

Vereecken, Philippe

;

Kessels, Erwin

;

Creatore, Adriana

Statistics

1906 since deposited on 2021-10-23

Acq. date: 2026-03-18