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Electrical characterization of ultrathin RF-sputtered LiPON layers for nanoscale batteries

dc.contributor.authorPut, Brecht
dc.contributor.authorVereecken, Philippe
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorSepulveda Marquez, Alfonso
dc.contributor.authorStesmans, Andre
dc.date.accessioned2021-10-23T13:54:46Z
dc.date.available2021-10-23T13:54:46Z
dc.date.issued2016
dc.identifier.issn1944-8244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27173
dc.sourceIIOimport
dc.titleElectrical characterization of ultrathin RF-sputtered LiPON layers for nanoscale batteries
dc.typeJournal article
dc.contributor.imecauthorPut, Brecht
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorSepulveda Marquez, Alfonso
dc.contributor.imecauthorStesmans, Andre
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage7060
dc.source.endpage7069
dc.source.journalACS Applied Materials & Interfaces
dc.source.issue11
dc.source.volume8
dc.identifier.urlhttp://pubs.acs.org/doi/abs/10.1021/acsami.5b12500
imec.availabilityPublished - open access


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