Electrical characterization of ultrathin RF-sputtered LiPON layers for nanoscale batteries

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Authors

Put, Brecht; Vereecken, Philippe; Meersschaut, Johan; Sepulveda Marquez, Alfonso; Stesmans, Andre

ISSN

1944-8244

Issue

11

Journal

ACS Applied Materials & Interfaces

Volume

8

Title

Electrical characterization of ultrathin RF-sputtered LiPON layers for nanoscale batteries

Publication type

Journal article

Embargo date

9999-12-31

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