Publication:

Electrical characterization of ultrathin RF-sputtered LiPON layers for nanoscale batteries

Date

2016
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorPut, Brecht
dc.contributor.authorVereecken, Philippe
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorSepulveda Marquez, Alfonso
dc.contributor.authorStesmans, Andre
dc.contributor.imecauthorPut, Brecht
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorSepulveda Marquez, Alfonso
dc.contributor.imecauthorStesmans, Andre
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.date.accessioned2021-10-23T13:54:46Z
dc.date.available2021-10-23T13:54:46Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.issn1944-8244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27173
dc.identifier.urlhttp://pubs.acs.org/doi/abs/10.1021/acsami.5b12500
dc.source.beginpage7060
dc.source.endpage7069
dc.source.issue11
dc.source.journalACS Applied Materials & Interfaces
dc.source.volume8
dc.title

Electrical characterization of ultrathin RF-sputtered LiPON layers for nanoscale batteries

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
33219.pdf
Size:
1.36 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles