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Metal stack optimization for low-power and high-density for N7-N5

dc.contributor.authorRaghavan, Praveen
dc.contributor.authorFirouzi, Farshad
dc.contributor.authorMatti, L.
dc.contributor.authorDebacker, Peter
dc.contributor.authorBaert, Rogier
dc.contributor.authorSherazi, Yasser
dc.contributor.authorTrivkovic, Darko
dc.contributor.authorGerousis, V.
dc.contributor.authorDusa, Mircea
dc.contributor.authorRyckaert, Julien
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVerkest, Diederik
dc.contributor.authorMcIntyre, Greg
dc.contributor.authorRonse, Kurt
dc.date.accessioned2021-10-23T13:57:30Z
dc.date.available2021-10-23T13:57:30Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27179
dc.sourceIIOimport
dc.titleMetal stack optimization for low-power and high-density for N7-N5
dc.typeProceedings paper
dc.contributor.imecauthorDebacker, Peter
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorSherazi, Yasser
dc.contributor.imecauthorTrivkovic, Darko
dc.contributor.imecauthorDusa, Mircea
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecDebacker, Peter::0000-0003-3825-5554
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage97810Q
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability X
dc.source.conferencedate24/02/2016
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2510926
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9781


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