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Design and fabrication of a two layer thin film interconnection system on glass for use in a parallel free-space optical interconnection demonstrator

dc.contributor.authorLernout, Jo
dc.contributor.authorVanfleteren, Jan
dc.contributor.authorVan Calster, Andre
dc.contributor.authorVanwassenhove, Luc
dc.contributor.authorVan Daele, P.
dc.date.accessioned2021-09-30T12:34:07Z
dc.date.available2021-09-30T12:34:07Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2719
dc.sourceIIOimport
dc.titleDesign and fabrication of a two layer thin film interconnection system on glass for use in a parallel free-space optical interconnection demonstrator
dc.typeProceedings paper
dc.contributor.imecauthorVanfleteren, Jan
dc.contributor.imecauthorVan Calster, Andre
dc.contributor.orcidimecVanfleteren, Jan::0000-0002-9654-7304
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage7
dc.source.endpage9
dc.source.conference3rd European Conference on Electronic Packaging Technology and 9th International Conference on Interconnection Technology in Ele
dc.source.conferencedate15/06/1998
dc.source.conferencelocationNuremberg Germany
imec.availabilityPublished - open access
imec.internalnotesDVS Berichte; Vol. 191


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