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Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films

dc.contributor.authorRedzheb, Murad
dc.contributor.authorPrager, Lutz
dc.contributor.authorNaumov, Sergej
dc.contributor.authorArmini, Silvia
dc.contributor.authorVoort, Pascal Van Der
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-23T14:07:43Z
dc.date.available2021-10-23T14:07:43Z
dc.date.issued2016
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27203
dc.sourceIIOimport
dc.titleEffect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage12902
dc.source.journalApplied Physics Letters
dc.source.issue1
dc.source.volume108
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/108/1/10.1063/1.4939449
imec.availabilityPublished - open access


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