Publication:
Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1891 since deposited on 2021-10-23
408item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1891 since deposited on 2021-10-23
408item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations