Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films

dc.contributor.author	Redzheb, Murad
dc.contributor.author	Prager, Lutz
dc.contributor.author	Naumov, Sergej
dc.contributor.author	Armini, Silvia
dc.contributor.author	Voort, Pascal Van Der
dc.contributor.author	Krishtab, Mikhail
dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.imecauthor	Armini, Silvia
dc.contributor.imecauthor	Krishtab, Mikhail
dc.contributor.orcidimec	Armini, Silvia::0000-0003-0578-3422
dc.date.accessioned	2021-10-23T14:07:43Z
dc.date.available	2021-10-23T14:07:43Z
dc.date.embargo	9999-12-31
dc.date.issued	2016
dc.identifier.issn	0003-6951
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/27203
dc.identifier.url	http://scitation.aip.org/content/aip/journal/apl/108/1/10.1063/1.4939449
dc.source.beginpage	12902
dc.source.issue	1
dc.source.journal	Applied Physics Letters
dc.source.volume	108
dc.title	Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films
dc.type	Journal article
dspace.entity.type	Publication
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