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Pore surface grafting of porous low-k dielectrics by selective polymers

dc.contributor.authorRezvanov, Askar
dc.contributor.authorZhang, Liping
dc.contributor.authorWatanabe, Mitsuhiro
dc.contributor.authorHacker, Nigel
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorArmini, Silvia
dc.contributor.authorde Marneffe, Jean-Francois
dc.date.accessioned2021-10-23T14:10:28Z
dc.date.available2021-10-23T14:10:28Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27209
dc.sourceIIOimport
dc.titlePore surface grafting of porous low-k dielectrics by selective polymers
dc.typeMeeting abstract
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferencePlasma Etch and Strip in Microtechnology - PESM
dc.source.conferencedate5/09/2016
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - open access


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