Authors

Ribeiro, Thales; Simoen, Eddy; Claeys, Cor; Martino, Joao A.; Pavanello, Marcello

Conference

31st Symposium on Microelectronics Technology and Devices - SBMICRO

Title

Analysis of carrier mobility in triple gate SOI nFinFET combining rotated substrate and strain

Publication type

Proceedings paper

Embargo date

9999-12-31