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Integration of a templated DSA based hole shrink in a short loop via chain

dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorChan, BT
dc.contributor.authorDoise, Jan
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorHeylen, Nancy
dc.contributor.authorDemuynck, Steven
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-23T14:13:39Z
dc.date.available2021-10-23T14:13:39Z
dc.date.issued2016
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27217
dc.sourceIIOimport
dc.titleIntegration of a templated DSA based hole shrink in a short loop via chain
dc.typeJournal article
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewyes
dc.source.beginpage43505-1
dc.source.endpage43505-9
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.issue4
dc.source.volume15
dc.identifier.urlhttp://spie.org/publications/journal/10.1117/1.JMM.15.4.043505
imec.availabilityPublished - imec


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