Integration of a templated DSA based hole shrink in a short loop via chain

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Authors

Rincon Delgadillo, Paulina; Chan, BT; Doise, Jan; van der Veen, Marleen; Heylen, Nancy; Demuynck, Steven; Boemmels, Juergen; Gronheid, Roel

ISSN

1932-5150

Issue

4

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

15

Title

Integration of a templated DSA based hole shrink in a short loop via chain

Publication type

Journal article

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