Publication:

Integration of a templated DSA based hole shrink in a short loop via chain

Date

2016
Journal article
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dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorChan, BT
dc.contributor.authorDoise, Jan
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorHeylen, Nancy
dc.contributor.authorDemuynck, Steven
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorGronheid, Roel
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.accessioned2021-10-23T14:13:39Z
dc.date.available2021-10-23T14:13:39Z
dc.date.issued2016
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27217
dc.identifier.urlhttp://spie.org/publications/journal/10.1117/1.JMM.15.4.043505
dc.source.beginpage43505-1
dc.source.endpage43505-9
dc.source.issue4
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.volume15
dc.title

Integration of a templated DSA based hole shrink in a short loop via chain

dc.typeJournal article
dspace.entity.typePublication
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