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Defect characterization in templated DSA through electrical measurements

dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorChan, BT
dc.contributor.authorGronheid, Roel
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorHeylen, Nancy
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorDemuynck, Steven
dc.contributor.authorBoemmels, Juergen
dc.date.accessioned2021-10-23T14:14:06Z
dc.date.available2021-10-23T14:14:06Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27218
dc.sourceIIOimport
dc.titleDefect characterization in templated DSA through electrical measurements
dc.typeOral presentation
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewno
dc.source.conferenceSPIE- Advanced Lithography
dc.source.conferencedate21/02/2016
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://spie.org/AL16/conferencedetails/alternative-lithographic-technologies
imec.availabilityPublished - imec
imec.internalnotes9777-27


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