Publication:

Fast analytical design of MEMS capacitive pressure sensors with sealed cavities

Date

2016

Journal article

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Author(s)

Rochus, Veronique

;

;

Tilmans, Harrie

;

Ray Chaudhuri, Ashesh

;

Helin, Philippe

;

;

Rottenberg, Xavier

Journal

Mechatronics

Statistics

1991 since deposited on 2021-10-23

Acq. date: 2026-02-25