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Fast analytical design of MEMS capacitive pressure sensors with sealed cavities
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Authors
Rochus, Veronique
;
Wang, Bo
;
Tilmans, Harrie
;
Ray Chaudhuri, Ashesh
;
Helin, Philippe
;
Severi, Simone
;
Rottenberg, Xavier
ISSN
0957-4158
Journal
Mechatronics
Volume
40
Title
Fast analytical design of MEMS capacitive pressure sensors with sealed cavities
Publication type
Journal article
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