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Fast analytical design of MEMS capacitive pressure sensors with sealed cavities

dc.contributor.authorRochus, Veronique
dc.contributor.authorWang, Bo
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorHelin, Philippe
dc.contributor.authorSeveri, Simone
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-23T14:16:38Z
dc.date.available2021-10-23T14:16:38Z
dc.date.issued2016
dc.identifier.issn0957-4158
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27223
dc.sourceIIOimport
dc.titleFast analytical design of MEMS capacitive pressure sensors with sealed cavities
dc.typeJournal article
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorWang, Bo
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage244
dc.source.endpage250
dc.source.journalMechatronics
dc.source.volume40
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0957415816300502
imec.availabilityPublished - imec


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