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A new approach for the measurement of resistivity and cross-sectional area of an aluminium interconnect line: principle and applications

dc.contributor.authorLi, Hua
dc.contributor.authorJin, S.
dc.contributor.authorProost, Joris
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorFroyen, L.
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-01T08:28:59Z
dc.date.available2021-10-01T08:28:59Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2722
dc.sourceIIOimport
dc.titleA new approach for the measurement of resistivity and cross-sectional area of an aluminium interconnect line: principle and applications
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage197
dc.source.endpage204
dc.source.conferenceAdvanced Metallization and Interconnect Systems for ULSI Applications in 1997
dc.source.conferencedate30/09/1997
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Conference Proceedings; Vol. ULSI XII


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