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CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing

dc.contributor.authorRyckeboer, Eva
dc.contributor.authorNie, Xiaomin
dc.contributor.authorSubramanian, Ananth
dc.contributor.authorMartens, Daan
dc.contributor.authorBienstman, Peter
dc.contributor.authorClemmen, Stephane
dc.contributor.authorSeveri, Simone
dc.contributor.authorJansen, Roelof
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-23T14:28:32Z
dc.date.available2021-10-23T14:28:32Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27251
dc.sourceIIOimport
dc.titleCMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing
dc.typeProceedings paper
dc.contributor.imecauthorRyckeboer, Eva
dc.contributor.imecauthorNie, Xiaomin
dc.contributor.imecauthorBienstman, Peter
dc.contributor.imecauthorClemmen, Stephane
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecRyckeboer, Eva::0000-0001-8648-3258
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.contributor.orcidimecClemmen, Stephane::0000-0003-0192-4662
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage98911K
dc.source.conferenceSilicon Photonics and Photonics Integrated Circuits V
dc.source.conferencedate13/05/2016
dc.source.conferencelocationBrussels Belgium
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2523727
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9891


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