Fabrication of substrate-less planar silicon photonic crystal cavities
dc.contributor.author | Saurav, Kumar | |
dc.contributor.author | Le Thomas, Nicolas | |
dc.date.accessioned | 2021-10-23T14:36:41Z | |
dc.date.available | 2021-10-23T14:36:41Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27269 | |
dc.source | IIOimport | |
dc.title | Fabrication of substrate-less planar silicon photonic crystal cavities | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Le Thomas, Nicolas | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 107 | |
dc.source.endpage | 110 | |
dc.source.conference | Proceedings of the 20th Annual Symposium of the IEEE Photonics Society Benelux Chapter | |
dc.source.conferencedate | 8/02/2016 | |
dc.source.conferencelocation | Brussels Belgium | |
imec.availability | Published - open access | |
imec.internalnotes | ISBN 978-2-8052-0288-9 |