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Dielectric properties of spin-on metal oxides and their applications for 2D semiconductor devices

dc.contributor.authorSayan, Safak
dc.contributor.authorLin, Dennis
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorChiappe, Daniele
dc.contributor.authorSutar, Surajit
dc.contributor.authorRadu, Iuliana
dc.contributor.authorThean, Aaron
dc.contributor.authorPetermann, Claire
dc.contributor.authorHong, Sung Eun
dc.date.accessioned2021-10-23T14:37:54Z
dc.date.available2021-10-23T14:37:54Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27272
dc.sourceIIOimport
dc.titleDielectric properties of spin-on metal oxides and their applications for 2D semiconductor devices
dc.typeOral presentation
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorSutar, Surajit
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorPetermann, Claire
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.source.peerreviewno
dc.source.conferenceSPIE Advanced Lithography Conference
dc.source.conferencedate22/02/2016
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://spie.org/AL16/conferencedetails/advances-resist-patterning-materials-processes
imec.availabilityPublished - imec
imec.internalnotes9779-19


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