Publication:

Toward sub-20nm pitch Fin patterning and integration with DSA

Date

2016

Proceedings Paper

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Files

32570.pdf 1.04 MB

Author(s)

;

Marzook, Taisir

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;

Vandenbroeck, Nadia

;

;

;

Altamirano Sanchez, Efrain

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Leray, Philippe

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Rincon Delgadillo, Paulina

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;

Vandenberghe, Geert

;

;

Juncker, Aurelie

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Acq. date: 2026-01-06