Toward sub-20nm pitch Fin patterning and integration with DSA

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Author(s)

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Marzook, Taisir

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Vandenbroeck, Nadia

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Altamirano Sanchez, Efrain

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Leray, Philippe

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Rincon Delgadillo, Paulina

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Vandenberghe, Geert

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Juncker, Aurelie

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1943 since deposited on 2021-10-23

Acq. date: 2025-10-24