Double-sided processing for membrane-based photonic integration

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Authors
Shen, Longfei; Jiao, Yuqing; Higuera-Rodriguez, Aura; Millan-Mejia, Alonso; Roelkens, Gunther; Smit, M.; van de Tol, Jos
Conference
18th European Conference in Integrated Optics - ECIO
Title
Double-sided processing for membrane-based photonic integration
Publication type
Meeting abstract
Embargo date
9999-12-31
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