Authors

Simoen, Eddy; Dhayalan, Sathish Kumar; Jayachandran, Suseendran; Gupta, Somya; Gencarelli, Federica; Hikavyy, Andriy; Loo, Roger; Rosseel, Erik; Delabie, Annelies; Caymax, Matty; Langer, Robert; Barla, Kathy; Vrielinck, Henk; Lauwaert, Johan

Conference

China Semiconductor Technology International Conference - CSTIC Symposium IV: Thin Film and Process Integration

Title

Study of electrically active defects in epitaxial layers on silicon

Publication type

Proceedings paper