Study of electrically active defects in epitaxial layers on silicon

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Author(s)

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Dhayalan, Sathish Kumar

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Jayachandran, Suseendran

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Gencarelli, Federica

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Hikavyy, Andriy

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Delabie, Annelies

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Vrielinck, Henk

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Lauwaert, Johan

Metrics

1923 since deposited on 2021-10-23

Acq. date: 2025-10-24