Deep levels in silicon-oxygen superlattices

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Authors

Simoen, Eddy; Jayachandran, Suseendran; Delabie, Annelies; Caymax, Matty; Heyns, Marc

ISSN

0268-1242

Issue

2

Journal

Semiconductor Science and Technology

Volume

31

Title

Deep levels in silicon-oxygen superlattices

Publication type

Journal article

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