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Deep levels in silicon-oxygen superlattices

dc.contributor.authorSimoen, Eddy
dc.contributor.authorJayachandran, Suseendran
dc.contributor.authorDelabie, Annelies
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-23T14:58:07Z
dc.date.available2021-10-23T14:58:07Z
dc.date.issued2016
dc.identifier.issn0268-1242
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27318
dc.sourceIIOimport
dc.titleDeep levels in silicon-oxygen superlattices
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorJayachandran, Suseendran
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewyes
dc.source.beginpage25015
dc.source.journalSemiconductor Science and Technology
dc.source.issue2
dc.source.volume31
dc.identifier.urlhttp://iopscience.iop.org/article/10.1088/0268-1242/31/2/025015/pdf
imec.availabilityPublished - imec


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