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Manufacturability of dense hole arrays with directed self-assembly using the CHIPS flow

dc.contributor.authorSingh, Arjun
dc.contributor.authorNam, Jaewoo
dc.contributor.authorLee, Jongsu
dc.contributor.authorChan, BT
dc.contributor.authorWu, Hengpeng
dc.contributor.authorYin, Jian
dc.contributor.authorCao, Yi
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-23T15:01:27Z
dc.date.available2021-10-23T15:01:27Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27325
dc.sourceIIOimport
dc.titleManufacturability of dense hole arrays with directed self-assembly using the CHIPS flow
dc.typeProceedings paper
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage97770P
dc.source.conferenceAlternative Lithographic Technologies VIII
dc.source.conferencedate21/02/2016
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2506453
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9777


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