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Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy

dc.contributor.authorSuh, Hyu Seon
dc.contributor.authorChen, Xuanxuan
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorJiang, Zhang
dc.contributor.authorStrzalka, Joseph
dc.contributor.authorWang, Jin
dc.contributor.authorChen, Wei
dc.contributor.authorGronheid, Roel
dc.contributor.authorde Pablo, Juan
dc.contributor.authorFerrier, Nicola
dc.contributor.authorDoxastakis, Manolis
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-23T15:19:09Z
dc.date.available2021-10-23T15:19:09Z
dc.date.issued2016
dc.identifier.issn1600-5767
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27362
dc.sourceIIOimport
dc.titleCharacterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy
dc.typeJournal article
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.source.peerreviewyes
dc.source.beginpage823
dc.source.endpage834
dc.source.journalJournal of Applied Crystallography
dc.source.volume49
dc.identifier.urlhttp://scripts.iucr.org/cgi-bin/paper?S1600576716004453
imec.availabilityPublished - imec


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