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Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy
Publication:
Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy
Date
2016
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Suh, Hyu Seon
;
Chen, Xuanxuan
;
Rincon Delgadillo, Paulina
;
Jiang, Zhang
;
Strzalka, Joseph
;
Wang, Jin
;
Chen, Wei
;
Gronheid, Roel
;
de Pablo, Juan
;
Ferrier, Nicola
;
Doxastakis, Manolis
;
Nealey, Paul
Journal
Journal of Applied Crystallography
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1956
since deposited on 2021-10-23
Acq. date: 2025-10-23
Citations
Metrics
Views
1956
since deposited on 2021-10-23
Acq. date: 2025-10-23
Citations