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Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy

Date

2016
Journal article
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dc.contributor.authorSuh, Hyu Seon
dc.contributor.authorChen, Xuanxuan
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorJiang, Zhang
dc.contributor.authorStrzalka, Joseph
dc.contributor.authorWang, Jin
dc.contributor.authorChen, Wei
dc.contributor.authorGronheid, Roel
dc.contributor.authorde Pablo, Juan
dc.contributor.authorFerrier, Nicola
dc.contributor.authorDoxastakis, Manolis
dc.contributor.authorNealey, Paul
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.date.accessioned2021-10-23T15:19:09Z
dc.date.available2021-10-23T15:19:09Z
dc.date.issued2016
dc.identifier.issn1600-5767
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27362
dc.identifier.urlhttp://scripts.iucr.org/cgi-bin/paper?S1600576716004453
dc.source.beginpage823
dc.source.endpage834
dc.source.journalJournal of Applied Crystallography
dc.source.volume49
dc.title

Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy

dc.typeJournal article
dspace.entity.typePublication
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