Optimized rinsing for low metallic contamination
dc.contributor.author | Loewenstein, Lee | |
dc.contributor.author | Mertens, Paul | |
dc.date.accessioned | 2021-10-01T08:29:09Z | |
dc.date.available | 2021-10-01T08:29:09Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2736 | |
dc.source | IIOimport | |
dc.title | Optimized rinsing for low metallic contamination | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 89 | |
dc.source.endpage | 96 | |
dc.source.conference | Proceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing | |
dc.source.conferencedate | 31/08/1997 | |
dc.source.conferencelocation | Paris France | |
imec.availability | Published - open access | |
imec.internalnotes | Electrochemical Society Proceedings; Vol. 97-35 |