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Design for hybrid SOI/silicon nitride high cooperativity optomechanical cavity

dc.contributor.authorTiebot, Paul
dc.contributor.authorKuyken, Bart
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-23T15:34:07Z
dc.date.available2021-10-23T15:34:07Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27394
dc.sourceIIOimport
dc.titleDesign for hybrid SOI/silicon nitride high cooperativity optomechanical cavity
dc.typeProceedings paper
dc.contributor.imecauthorKuyken, Bart
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage223
dc.source.endpage226
dc.source.conferenceProceedings Symposium IEEE Photonics Society Benelux
dc.source.conferencedate17/11/2016
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - open access
imec.internalnotesISBN 978-9-0825-0050-9


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