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End of Cu roadmap and beyond Cu

dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-23T15:34:56Z
dc.date.available2021-10-23T15:34:56Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27396
dc.sourceIIOimport
dc.titleEnd of Cu roadmap and beyond Cu
dc.typeProceedings paper
dc.contributor.imecauthorTokei, Zsolt
dc.source.peerreviewno
dc.source.conferenceIEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC
dc.source.conferencedate23/05/2016
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7507738/
imec.availabilityPublished - imec


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