Publication:

CMP process steps for the fabrication of spin-transfer torque magnetic random access memory

Date

2016

Proceedings Paper

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Author(s)

Tsvetanova, Diana

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Donadio, Gabriele Luca

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Kar, Gouri Sankar

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Struyf, Herbert

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Souriau, Laurent

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Couet, Sebastien

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Paraschiv, Vasile

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Statistics

1928 since deposited on 2021-10-23

Acq. date: 2026-06-13