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CMP process steps for the fabrication of spin-transfer torque magnetic random access memory
Publication:
CMP process steps for the fabrication of spin-transfer torque magnetic random access memory
Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tsvetanova, Diana
;
Heylen, Nancy
;
Teugels, Lieve
;
Crotti, Davide
;
Donadio, Gabriele Luca
;
Kar, Gouri Sankar
;
Struyf, Herbert
;
Souriau, Laurent
;
Mertens, Sofie
;
Swerts, Johan
;
Couet, Sebastien
;
Lin, Tsann
;
Paraschiv, Vasile
;
Kim, Woojin
;
Rao, Siddharth
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1922
since deposited on 2021-10-23
416
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Acq. date: 2025-10-25
Citations
Metrics
Views
1922
since deposited on 2021-10-23
416
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations