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Design strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)

dc.contributor.authorTung, C. Maryann
dc.contributor.authorDoise, Jan
dc.contributor.authorKarageorgos, Ioannis
dc.contributor.authorRyckaert, Julien
dc.contributor.authorWong, H.-S. Philip
dc.date.accessioned2021-10-23T15:41:39Z
dc.date.available2021-10-23T15:41:39Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27409
dc.sourceIIOimport
dc.titleDesign strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)
dc.typeProceedings paper
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorRyckaert, Julien
dc.source.peerreviewyes
dc.source.beginpage5C4
dc.source.conferenceElectron, Ion, and Photon Beam Technology and Nanofrabrication - EIPBN
dc.source.conferencedate31/05/2016
dc.source.conferencelocationPittsburgh, PA USA
dc.identifier.urlhttp://eipbn.omnibooksonline.com/data/papers/2016/5C4.pdf
imec.availabilityPublished - imec


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