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Ultra thin gate oxides for 0.1µm heterojunction CMOS applications by the use of a sacrificial Si layer
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1901 since deposited on 2021-10-01
1last month
Acq. date: 2025-12-12
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1901 since deposited on 2021-10-01
1last month
Acq. date: 2025-12-12
Citations