Authors

Loo, Roger; Caymax, Matty; Verheyen, P.; Conard, Thierry; Bender, Hugo; Vandervorst, Wilfried; Collaert, Nadine; De Meyer, Kristin

Conference

Proceedings of the 28th European Solid-State Device Research Conference - ESSDERC'98; 8-10 Sept. 1998; Bordeaux, France.

Title

Ultra thin gate oxides for 0.1µm heterojunction CMOS applications by the use of a sacrificial Si layer

Publication type

Proceedings paper