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Molecular layer deposition of "titanicone", a titanium-based hybrid material

dc.contributor.authorVan de Kerckhove, Kevin
dc.contributor.authorMattelaer, Felix
dc.contributor.authorDeduytsche, Davy
dc.contributor.authorVereecken, Philippe
dc.contributor.authorDendooven, Jolien
dc.contributor.authorDetavernier, Christophe
dc.date.accessioned2021-10-23T15:52:43Z
dc.date.available2021-10-23T15:52:43Z
dc.date.issued2016
dc.identifier.issn1477-9226
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27432
dc.sourceIIOimport
dc.titleMolecular layer deposition of "titanicone", a titanium-based hybrid material
dc.typeJournal article
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewyes
dc.source.beginpage1176
dc.source.endpage1184
dc.source.journalDalton Transactions
dc.source.issue3
dc.source.volume45
dc.identifier.urlhttp://pubs.rsc.org/en/content/articlelanding/2016/dt/c5dt03840e#!divAbstract
imec.availabilityPublished - imec


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