Molecular layer deposition of "titanicone", a titanium-based hybrid material

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Authors

Van de Kerckhove, Kevin; Mattelaer, Felix; Deduytsche, Davy; Vereecken, Philippe; Dendooven, Jolien; Detavernier, Christophe

ISSN

1477-9226

Issue

3

Journal

Dalton Transactions

Volume

45

Title

Molecular layer deposition of "titanicone", a titanium-based hybrid material

Publication type

Journal article

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