Publication:
Molecular layer deposition of "titanicone", a titanium-based hybrid material
Date
| dc.contributor.author | Van de Kerckhove, Kevin | |
| dc.contributor.author | Mattelaer, Felix | |
| dc.contributor.author | Deduytsche, Davy | |
| dc.contributor.author | Vereecken, Philippe | |
| dc.contributor.author | Dendooven, Jolien | |
| dc.contributor.author | Detavernier, Christophe | |
| dc.contributor.imecauthor | Vereecken, Philippe | |
| dc.contributor.orcidimec | Vereecken, Philippe::0000-0003-4115-0075 | |
| dc.date.accessioned | 2021-10-23T15:52:43Z | |
| dc.date.available | 2021-10-23T15:52:43Z | |
| dc.date.issued | 2016 | |
| dc.identifier.issn | 1477-9226 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27432 | |
| dc.identifier.url | http://pubs.rsc.org/en/content/articlelanding/2016/dt/c5dt03840e#!divAbstract | |
| dc.source.beginpage | 1176 | |
| dc.source.endpage | 1184 | |
| dc.source.issue | 3 | |
| dc.source.journal | Dalton Transactions | |
| dc.source.volume | 45 | |
| dc.title | Molecular layer deposition of "titanicone", a titanium-based hybrid material | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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